KLA-TENCOR 2132 | KLA-TENCOR 2135 | KLA-TENCOR 2138 | KLA-TENCOR 2139 |
710-658161-20 TDI Board 710-658076-20 Defect Proc Phase3 710-658081-20 Defect Filter Phase3 710-658051-20 Mass MEM Phase3 | 710-677782-00 Single X-Axis Control 4 710-650204-20 Y-Flex Board 710-659025-00 ZPLL 2 Board 710-659227-00 WIB 3 710-678434-00 TDI Daughter Board 710-678890-00 Full Field Align2 Board 10-661726-00 S.A.T. Defect Filter 710-663106-000 Dual Stepper Driver 2 710-679609-002 Tested, EMC X-FLEX-5 | 710-658956-00 Mass Memory 2 | 710-663106-001 DSD Board 710-663509-000 Autofocus Ctrl AFC2B 710-679609-003 XFLEX-5 EMC PCB 710-679821-001 Auto Focus Board 710-667685-000 ADSC Board 710-679920-00 Single Y-AXIS Ctrl 4 710-679819-00 Tested, EMC X-SAC 4 710-657600-20 AutoFocus BD(E-Draw) 0031778-000 RIO2 Board 710-658669-00 PLLAD Daughter Board 740-679994-001 Image Sensor, 2135C 740-695511-000 System PLLAD 4 CE 740-677509-00 PLLAD 750-660755-001 NanosensorElectronic 710-689987-000 VIF 3 710-678525-001 EscortDefectFilter v4 710-679375-002 EscortDisplayProcsr3 740-689986-002 MMED 2139 710-658909-001 Interpolator Board 710-663424-001 SAT Defect Procsr,V2 710-650044-20 Defect Detector PCB 710-663509-000 Autofocus Ctrl AFC2B |
KLA-TENCOR 6420 | KLA-TENCOR Fx200 | KLA-TENCOR UV1050/1250 | KLA-TENCOR UV1080/1280 |
Below Wafer Dete. Assy. 290840 Analog Board 535893 CPU Board 75MHZ 238740 GPIO Board 277266 Timing Generator Board 198331 4 CHNL MTR CNTRL 033794 PT1010458-04 REV.L 030683 4CHNL PWM Motor Dr.Dist. BD 273163 Particle/Area PRCSSR 273341 2X SMPL Haze Separatr | 0334524-000 Xenon Lamp Parabolic Mirror | 52-0375 Assy. Vacuum Finger, H2 | 54-0287 Stage Driver Board |